Brooks Instrument Mass Flow Controller, Model 5850E
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5850EM

Series: 5850EM Series Metal Sealed Thermal Mass Flow Controller Brand: Brooks Instrument

Metal Sealed Thermal Mass Flow Controller, Flow range 0-3 sccm to -30,000 sccm nitrogen eq.

Price
$860.00 CAD
Stock
50+ In Stock
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Specifications

Brand

Approvals & Certifications

  • EMC
  • CE
  • EN 61326-1: 2006

Process Connection

  • 1/4" Tube VCR
  • Integrally Welded to Body: Standard 1/4" VCR® with 0.250" Bore; Optional 3/8" - 1/2" VCR

Repeatability

  • 0.25% of Rate

VCR / VCO Connection

  • 1/2” VCR
  • 1/2” VCO
  • 1/4” VCO
  • 1/4” VCR
  • 3/8” VCO
  • 3/8” VCR

Flow Range (Full Scale Capacity)

  • 5850EM: 3 to 30,000 sccm
  • 5851EM: 10 to 100 slpm Nitrogen

Surface Finish

  • Enhanced Process (5 Ra avg.) Internal Surface Finish (Optional)

Accuracy

  • 1% F.S. Including Linearity
  • 1.5% F.S. Including Linearity (>20 slpm)

Response Time

  • Normally Closed Valve:  < 3 sec

Analog Communication

  • 4-20 mA
  • 0-5 Vdc

Seal Material

  • Nickel 200

Wetted Material

  • Valve Seat: 316L, Viton® Fluoroelastomers, Buna-N, Kalrez® or Teflon®

Differential Pressure Range

  • 5 to 50 psi (Gas and Range Dependent)

Operating Pressure

  • Max 1,500 psi

Ambient Temperature

  • Operating: 40° to 150° F (5° to 65° C)
  • Non-Operating: -13° to 212° F (-25° to 100° C)
  • 5851EM: 41° to 149° F (5° to 65° C)

Electrical Connection

  • 15 Pin D Connector (DA-15P)

Power Supply/Consumption

  • Normally Open Valve: 10.5 Watts
  • Normally Closed Valve: 3.25 Watts

Documentation

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