Brooks Instrument Pressure Controller / Flow Meter, Model 5866RT
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5866RT

Series: Model 5866RT Elastomer Sealed Pressure Controller/Flow Meter Brand: Brooks Instrument

Elastomer Sealed Pressure Controller/Flow Meter

Price
$773.00 CAD
Stock
14 In Stock
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Specifications

Brand

Flow Range (Full Scale Capacity)

  • 0 - 3 sccm to 0 - 30,000 sccm N2 Eq.

Accuracy

  • ±1% F.S. Including Linearity at the Calibration Conditions
  • ±1.5% F.S. for Flow Rates Greater Than 20 slm

Repeatability

  • ±0.25% of Rate

Valve Type

  • Normally Closed
  • Normally Open
  • No Valve (Elastomer, Upstream Configuration Only)

Approvals & Certifications

  • CE
  • EMC Directive 89/336/EEC EN 61326-1
  • PED 97/23/EC

Process Connection

  • 1/8” or 1/4”  Compression Fittings
  • 1/4” VCO Male
  • 1/4” VCR Male

Pressure Control Range

  • 100:1 for A Remote Transducer with a 0-10 V Output

Pressure

  • Max 1,500 psig

Temperature Range

  • 0° to 65° C

Seal Material

  • Elastomer or Metal

Wetted Material

  • Standard 316L/316L VAR Stainless Steel
  • Valve Seat: Standard Viton® Fluoroelastomers or Metal
  • External/Internal Seals: Flouroelastomers or Metal
  • Optional: Buna-N, Teflon® or Kalrez®

Analog Communication

  • 0-5 V

Electrical Connection

  • 15-Pin "D" Connector

Power Supply/Consumption

  • Normally Closed: 3.5 watts; +15 Vdc (±5%) @ 35 mA, -15 Vdc (±5%) @ 180 mA
  • Normally Open: 10.5 watts; ±15 Vdc (±5%) @ 350 mA

Documentation

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