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5850EM Series Metal Sealed Thermal Mass Flow Controller
Brand: Brooks Instrument5850EM Series metal sealed mass flow controllers measure and control high-pressure gas flows in ultra-clean environments with a proven stability built on the performance of the widely used 5850E & i Series MFCs.
Its metal sealed construction and electro-polished wetted surfaces ensure outstanding flow integrity and help improve overall process efficiency by eliminating the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
Features- Long-term zero stability of < 0.2% full scale per year
- < 3 seconds settling time to command changes with negligible overshoot/undershoot
- Wide flow range – from 3 sccm up to 30,000 slpm
- High pressure rating - up to 1,500 psi
- Optional enhanced process internal finish - 5µ inch Ra avg
- Removable flow sensor
- Insensitive to mounting attitude
- Mechanically and electrically compatible with other mass flow controllers
- TTL compatible "valve off" and purge function
Benefits
- All-metal flow path enhances gas purity and reduces leaks
- Proven long-term stability and accuracy across broad process and application range
- Excellent return on investment due to reliable performance
- Removable flow sensor eliminates need for continuous monitoring and readjustment of gas pressures
- Easily installed and serviced with analog only input/outputs
Displaying prices & availability for Ohio, United States in CAD. Change location.
Models matching criteria: 2
Metal Sealed Thermal Mass Flow Controller, Flow range 0-3 sccm to -30,000 sccm nitrogen eq.
50+ In Stock
$860.00
CAD
Does not ship to OH, United States
Metal Sealed Thermal Mass Flow Controller, Flow range any full scale flow from 10 slpm to 100 slpm nitrogen eq.
10 In Stock
$688.00
CAD
Does not ship to OH, United States
Specifications
Brand
Approvals & Certifications
- EMC
- CE
- EN 61326-1: 2006
Process Connection
- 1/4" Tube VCR
- Integrally Welded to Body: Standard 1/4" VCR® with 0.250" Bore; Optional 3/8" - 1/2" VCR
Repeatability
- 0.25% of Rate
VCR / VCO Connection
- 1/2” VCR
- 1/2” VCO
- 1/4” VCO
- 1/4” VCR
- 3/8” VCO
- 3/8” VCR
Flow Range (Full Scale Capacity)
- 5850EM: 3 to 30,000 sccm
- 5851EM: 10 to 100 slpm Nitrogen
Surface Finish
- Enhanced Process (5 Ra avg.) Internal Surface Finish (Optional)
Accuracy
- 1% F.S. Including Linearity
- 1.5% F.S. Including Linearity (>20 slpm)
Response Time
- Normally Closed Valve: < 3 sec
Analog Communication
- 4-20 mA
- 0-5 Vdc
Seal Material
- Nickel 200
Wetted Material
- Valve Seat: 316L, Viton® Fluoroelastomers, Buna-N, Kalrez® or Teflon®
Differential Pressure Range
- 5 to 50 psi (Gas and Range Dependent)
Operating Pressure
- Max 1,500 psi
Ambient Temperature
- Operating: 40° to 150° F (5° to 65° C)
- Non-Operating: -13° to 212° F (-25° to 100° C)
- 5851EM: 41° to 149° F (5° to 65° C)
Electrical Connection
- 15 Pin D Connector (DA-15P)
Power Supply/Consumption
- Normally Open Valve: 10.5 Watts
- Normally Closed Valve: 3.25 Watts
- Fiber Optic
- LED / MOCVD
- Semiconductor
- Solar
