Approvals & Certifications
Seat / Seal Material
- Seal: Nickel
- Seat: 316L Stainless Steel
Accuracy
- ±1.0% of Rate, Including Linearity (20% to 100% F.S.)
- ±0.2% of F.S. (Below 20% Full Scale)
Flow Range
- 0-3 sccm to 0-30,000 sccm N2 eq
Operating Temperature
- 0° to 60° C (32° to 140° F)
- Non-Operating: -25° to 100° C (-13° to 212° F)
Wetted Material
- 316L Vacuum Arc Remelt (VAR), 316L, and High-alloy Ferritic Stainless Steel
- External/Internal Seals: Nickel
- Valve Seat: 316L Stainless Steel - Standard
Supply Voltage
- Analog I/O: +15 Vdc, ±5% (Traditional -15 Vdc Pin Is Ignored)
- Digital I/O DeviceNet: 11-25 Vdc
Power Requirement
- Analog I/O Option, with Valve: 3.6 W Typical, 4.0 W Max.
- DeviceNet I/O Option, with Valve: 6.9 W Typical, 7.6 W Max.