Flow Range (Full Scale Capacity)
- 0 - 3 sccm to 0 - 30,000 sccm N2 Eq.
Accuracy
- ±1% F.S. Including Linearity at the Calibration Conditions
- ±1.5% F.S. for Flow Rates Greater Than 20 slm
Valve Type
- Normally Closed
- Normally Open
- No Valve (Elastomer, Upstream Configuration Only)
Approvals & Certifications
- CE
- EMC Directive 89/336/EEC EN 61326-1
- PED 97/23/EC
Process Connection
- 1/8” or 1/4” Compression Fittings
- 1/4” VCO Male
- 1/4” VCR Male
Pressure Control Range
- 100:1 for A Remote Transducer with a 0-10 V Output
Wetted Material
- Standard 316L/316L VAR Stainless Steel
- Valve Seat: Standard Viton® Fluoroelastomers or Metal
- External/Internal Seals: Flouroelastomers or Metal
- Optional: Buna-N, Teflon® or Kalrez®
Power Supply/Consumption
- Normally Closed: 3.5 watts; +15 Vdc (±5%) @ 35 mA, -15 Vdc (±5%) @ 180 mA
- Normally Open: 10.5 watts; ±15 Vdc (±5%) @ 350 mA