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CMC Series Compact Capacitance Manometer
Brand: Brooks InstrumentCMC Series capacitance manometers from Brooks Instrument deliver reliable, accurate vacuum measurement over a wide range of operating temperatures, providing an economical alternative to larger premium unheated gauges.
Its compact design and proven performance make it an ideal upgrade for existing tools needing a small form-factor gauge.
Reliable and repeatable operation is assured in even the most aggressive processes through the all-welded design and Iconel® wetted surfaces.
The combination of precision components and a wide temperature compensated operating range lets Brooks deliver best-in-class zero and span temperature coefficients for optimum measurement stability.
Features- Available for process ranges from 10 Torr to 1,000 Torr
- Two accuracy levels available: 0.25% or 0.50% of reading (optional)
- Exceptional performance over a wide range of operating temperatures
- 40% smaller than traditional unheated capacitance manometers
- All-welded construction and Inconel® wetted surfaces
Benefits
- Optional high accuracy calibration matches the accuracy of more costly premium unheated manometers
- Best-in-class zero and span temperature coefficients
- Space-saving design helps fit device into tight machine spaces
- Optimum measurement repeatability compared to other designs that are prone to error inducing internal stresses
Specifications
Brand
Accuracy
- ±0.25% of Reading
- ±0.5% of Reading Optional
Expose Material
- Inconel
Compensated Temperature
- 0° to 50° C (30° to 130° F)
Operating Temperature
- 0° to 80° C (-32° to 176° F)
Response Time
- 20 milliseconds
Input Power
- 12-30 Vdc
Power Consumption
- < 200 mW
Fitting Connection
- KF10
- KF16
- KF25
- 8 VCR F
- 4 VCR M
- 4 VCR F
- 1/2” Tube Stub
- 1/4” Tube Stub
Pressure Type
- Absolute
Resolution
- ≤ 0.0006 % of Full Scale Limited by Output Noise
Pressure Range
- 10 to 1,000 Torr Full Scale
- psi: 0.19 to 19.33 (kPa: 1.31 to 133.27, bar: 0.01 to 1.33)
Output Signal
- 0-10 Vdc (<10 KΩ Load)
Electrical Connectors
- 15-Pin D-Sub on 6” (152.4 mm) Cable
- 5-Pin Terminal Strip
- 9-Pin D Sub
Temperature Effect
- Span: 0.027 % of Reading/°C
- Zero: 0.005 % of Full Scale/°C
Overpressure & Static Pressure Limits
- Over Pressure - psia: 45 (kPa: 310.3, bar: 3.1)
Approvals & Certifications
- REACH
- CE
- EMC Directive 89/336/EEC
- ISO 9001
- RoHS
- Semiconductor Fabrication
- Thin-Film Deposition Processes - Glass, Web & Optical Coatings
- Freeze Drying Perishable Materials
- High-Tech Coatings for Medical Instruments (Surgical Instruments, Dental Drills, etc.)
Documentation
Data Sheets
Product Manuals
Certifications
- CE EU Declaration of Conformity Certificate pdf 1.5 MB
- CE EU Declaration of Conformity Certificate - Romanian pdf 1.5 MB
- CE EU Declaration of Conformity Certificate - Russian pdf 1.5 MB
- CE EU Declaration of Conformity Certificate - Spanish pdf 1.5 MB
- CE EU Declaration of Conformity Certificate- Korean pdf 1.5 MB
