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XacTorr Series Model CMX160 Vacuum Capacitance Manometer
Brand: Brooks InstrumentBrooks CMX160 (XacTorr) is a compact heated vacuum gauge providing accurate total pressure measurement independent of gas composition.
The CMX160 Series’ digital architecture delivers improved performance, enables in-situ diagnostics and data logging facilities while maintaining an industry standard Analog interface.
Designed for demanding thin-film processes such as LPCVD Nitride and Metal-CVD, the CMX160 Series provides superior reliability by combining Brooks’ patented shielded sensor technonlogy and patent pending digital temperature control, greatly reducing the buildup of process condensable products that lead to process drift and premature failure of the gauge.
Features- Patented Mark IV Sensor
- Dual Zone Temperature Control
- Digital Calibration
- Digital Architecture
- Intelli-Touch Zero Adjustment
Benefits
- Lower drift, superior protection from deposition of process gases
- Fast warm-up, close temperature control, rapid response to changes
- Multi decade calibration provides superior window of known accuracy, real time com pensation of ambient temp effects Digital Architecture
- Eliminates manual potentiometers and drift associated with electronics
- Cannot be zeroed if pressure is too high or desired temperature not reached
Specifications
Brand
Approvals & Certifications
- CE
- EMC Directive 89/336/EEC
- RoHS
Tube Connection
- 1/2” Tube
VCR / VCO Connection
- 8 Female VCR
Operating Temperature
- 160° C
Full Scale Range
- 1, 2, 3, 10, 20, 100, 1,000 Torr
Accuracy
- 0.25% of Reading
Exposed Material
- Inconel
- AISI 316L Stainless Steel
Ambient Operating Temperature
- 15° to 35° C
Power Requirement
- 620 mA @ ± 15 Vdc (±5%) @ Initial Warm-up Analog Models, Typical Values
- 550 mA @ ± 15 Vdc (±5%) @ Steady State Analog Models, Typical Values
- 1.2 A @ 24 Vdc @ Initial Warm-up DeviceNet Models, Maximum Values
- 900 mA @ 24 Vdc @ Steady State DeviceNet Models, Typical Values
