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9861 Series Mass Flow Controller/Meter
Brand: Brooks InstrumentOriginally developed by Unit Instruments (later Celerity Inc.), the 9861 Series of high temperature mass flow controllers and meters continue to be manufactured using the same supply chain and copy exact process by Brooks Instrument who acquired the IP and assets of Celerity Inc. in 2009.
The 9861 Series remains the optimum choice for critical precursor and dopant vapor delivery in semiconductor and optical fiber manufacturing.
The 9861 Series are thermal mass flow controllers and meters designed for challenging high temperature delivery of condensable precursors and dopants.
A high purity, high leak integrity metal flow path ensures compatibility with all process gases and vapors.
The patented IsoSensor™ is a high stability flow sensor compatible with the elevated environmental temperatures found in heated gas lines and baking systems (temperature-controlled gas boxes).
The ultra-low drift performance of the IsoSensor reduces the need for frequent re-zeroing and recalibration typical in high temperature applications.
For maximum flexibility and inventory reduction, the 9861 Series remote electronics come standard with two analog electrical connectors (a 20 pin card edge and a 9 or a 15 pin “D” connector option) and Semi industry standard RS485 digital communication enabling easy retrofit and standardization.
In mass flow controller models, a diaphragm free solenoid control valve provides a wide dynamic control range for superior precision and control.
Designed for long-term reliability, the valve has been marathon tested to over 8 million cycles with no degradation in performance.
Features- High temperature mass flow controller
- Digital measurement and control architecture
- Ultra-High purity flow path
- Ultra-stable flow measurement sensor
- Upstream pressure buffering (optional)
- All metal diaphragm free control valve
- Dual I/O interfaces
Benefits
- Reliable delivery of condensable gases and precursors
- Enhanced accuracy and process control
- Ensures integrity and purity of gas/vapor
- Reduced maintenance for superior uptime and lowest cost of ownership
- Stable mass flow delivery under challenging supply conditions
- Enhanced long-term reliability
- Universal upgrade enabling standardization and inventory reduction
Specifications
Brand
Accuracy (N₂ Equivalent)
- < 35% F.S.: ± 0.35% of Full Scale (Per SEMI E56-96)
- 35% to 100% F.S.: ± 1% of Set Point (Per SEMI E56-96)
Repeatability
- ± 0.15% of Full Scale (Per SEMI E56-96)
Linearity
- ± 0.5% of Full Scale (Per SEMI E27-92)
Input/Output Signal
- Setpoint Input: 0-5 Vdc Linearly Proportional to Required Flow
- Output Monitor: 0-5 Vdc Linearly Proportional to Flow Rate
Flow Rate
- Standard 3 SCCM to 10 SLM (N₂ Equivalent)
Wetted Material
- 15-7 MO Stainless Steel
- 304 Stainless Steel
- 316L Stainless Steel
- KM-45 Stainless Steel
Seal Material
- Metal
Electrical Connectors
- 15-Pin D-Connector
- 20-Pin Card Edge Connector
- 9-Pin D-Connector
Power
- Meter (Analog): ± 15 Vdc, 50 mA Max.
- Controller (RS-485): ± 15 Vdc, 160 mA Max.
- Power Consumption: 5 W Max.
Thermal Siphoning & Attitude Sensitivity
- < 0.1% of Full Scale (30 psi SF₆)
Control Range
- 2% to 100%
Operating Pressure
- Differential - psia: 0.1929 to 50 (kPa: 1.33 to 350, bar: 0.0133 to 3.5) Typical
- psia: 90 (kPa: 620, bar: 6.2) Max
Ambient Temperature
- 0° to 150° C (32° to 302° F)
Fitting Connection
- 1/4” VCR Male
- 3/8” VCR Male
Warm-Up Period
- 30 minutes
Temperature Coefficient
- Span: 0.1% of Full Scale/°C (Ambient)
- Zero: 0.05% of Full Scale/°C (Ambient)
Mounting Position
- Horizontal
- Vertical
