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XacTorr Series Capacitance Manometer
Brand: Brooks InstrumentMaximize the efficiency and performance of your vacuum-dependent processes: Choose XacTorr® Series digital vacuum capacitance manometers from Brooks Instrument.
XacTorr® Series devices incorporate industry-leading features that improve measurement reliability, minimize drift, resist diaphragm contamination and minimize thermal effects.
The advanced Mark-IV sensor contains surface areas not used in pressure measurement – providing locations for particles and condensable vapors to accumulate.
This reduces the need to re-zero the gauge and increases sensor life without risking sensor drift. Additionally, an optional fast response sensor is available for superior closed loop control performance.
The result: ultra-accurate, repeatable and efficient vacuum measurement that ensures each time you evacuate a chamber, it reaches the precise Torr your process requires for clean, contaminant-free production.
Features- Available for process ranges from 0.10 Torr to 1000 Torr
- Multiple accuracy levels available
- Patented Mark IV sensor
- Digital architecture enables operation over a wide dynamic range with extremely good accuracy
- Dual-zone temperature control improves measurement stability and repeatability
- Multi-decade digital calibration provides superior window of known accuracy
- Intelli-touch zero adjustment
- Independent & easily accessible diagnostic service port
- DeviceNet® and analog communication options
Benefits
- Lower drift, superior protection from deposition of process gases
- Elimination of manual potentiometers and drift associated with electronics
- Fast warm-up, close temperature control, rapid response to changes
- Multi-decade calibration provides superior window of known accuracy, real-time compensation of ambient temperature effects
- Cannot be zeroed if pressure is too high or desired temperature not reached
- Diagnostic port allows monitoring and data acquisition simultaneously with device operation for chamber and tool matching along with “real time” advanced troubleshooting
Specifications
Brand
Approvals & Certifications
- CE
- EMC Directive 89/336/EEC
- RoHS
Tube Connection
- 1” O.D. Tube
VCR / VCO Connection
- 1/2” VCR Female
- 1/4” VCR Female
Pressure Range
- 0.1 to 1,000 Torr
Accuracy
- CMX0: 0.25% of Reading
- CMX1, CMX2: 1 to 1,000 Torr Ranges = 0.15% of Reading
- CMX1, CMX2: < 1 Torr Ranges = 0.25% of Reading
Exposed Material
- Inconel
- AISI 316L Stainless Steel
Digital Communication
- DeviceNet™
- RS485
Analog Communication
- 0-10 Vdc 5k Ohm Load
Temperature
- Max 160° C
- Semiconductor Fabrication
- Thin-film Deposition Processes – Glass, Web and Optical Coatings
- Freeze Drying Perishable Materials
- High-tech Toatings for Medical Instruments (Surgical Instruments, Dental Drills, etc.)
