Brooks Instrument Vapor Delivery Module, VDM300
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VDM300 DI Water Vapor Delivery Module

Brand: Brooks Instrument
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The Vapor Delivery Module (VDM) from Brooks Instrument is a high-performance, self-contained module for the highly accurate delivery of ultra-high purity deionized (DI) water vapor.

It features a power efficient design that enables low temperature, ultra-high purity vapor generation.

It utilizes a proven vapor delivery technique and combines it with advanced digital control and integrated diagnostic features in a small, convenient package.

Designed for advanced strip and post metal etch passivation processes, the VDM delivers improved accuracy, higher flow rates, wider control range and lower power consumption compared to flash evaporation systems.

Based on proven thermal mass flow measurement techniques, the VDM produces vapor in a non-super-heated vapor state, reducing the aggressive effects of deionized water, for improved reliability and cleaner operation.

The VDM offers user-friendly data logging and diagnostic features via an independent service port and an intuitive graphic user interface.
Features
  • Flow range: 3 slpm (DIW vapor)
  • Direct water vapor measurement with superior flow accuracy
  • Connects directly to the house deionized water supply
  • Operates at lower temperatures (non-superheated state)
  • Optimized design for flushing and draining
  • EtherCAT digital communications
  • Brooks Expert Support Tool (BEST) graphical user interface
Benefits
  • Utilizes proven, reliable thermal mass flow measurement and control technique
  • Highly tolerant of varying fab DI water supply pressure
  • Improved corrosion resistance in wetted path
  • Ensures cleaner operation
  • Tool interface using analog or digital communications
  • Direct user interface for enhanced data collection or troubleshooting

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Specifications

Brand

Approvals & Certifications

  • SEMI E54.20-1108
  • CE
  • EMC (Electromagnetic Compatibility): Fully Compliant to Directive 2014/30/EU (EN 61326-1: 2013)
  • LVD (Low Voltage): Fully Compliant to Directive 2014/35/EC (EN 61010-1: 2010)
  • REACH: Fully Compliant to Directive EC 1907/2006
  • RoHS: Fully Compliant to Directive 2011/65/EU

Tube Connection

  • 1/4” Compression Fitting

VCR / VCO Connection

  • 1/2” VCR Male
  • 1/4” VCR Male

Full Scale Flow Range (DIW Vapor)

  • 3,000 sccm

Accuracy

  • ±1.0% of Setpoint (> 10% Full Scale)
  • ±0.2% of Full Scale (5-10% Full Scale Setpoint)

Linearity

  • ±0.5% of Full Scale

Repeatability

  • <±0.2% of Full Scale

Communication

  • Digital: EtherCAT via Dual RJ-45 Jacks; Diagnostics (Rs-485) MicroUSB
  • Analog: 0 to 5-4 Vdc

Ambient Temperature

  • 15°  to 45° C

Humidity

  • 0 to 95% RH, Non-condensing

Response Time

  • < 2 sec

  • Silicon Semiconductor Post-Metal Etch Process
  • Silicon Semiconductor Metal Strip Process
  • Ultra-High Purity Humidification in Sub-Atmospheric Environments

Documentation

Data Sheets

Product Manuals

Bulletin

Certifications

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