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Model 5850EMH / 5851EMH High Temperature Mass Flow Controller
Brand: Brooks InstrumentOffering state of the art performance in high temperature gas measurement and control, the 5850EMH Series high temperature metal sealed mass flow controller from Brooks Instrument combines the outstanding leak integrity of metal seals with a variety of options allowing maximum application flexibility.
The heart of the 5850EMH Series is the highly stable sensor which provides an electrical output signal linear with flow rate. This signal is used for indicating, recording and/or control purposes without the need for an auto-zero circuit.
Features- High leak integrity (less than 10-11 Pa.m3/s (10-10 atm.cc/s) He)
- Wide flow range (0.003 – 100 slpm)
- High-purity VAR 316L Stainless Steel
- Particulate-free
- Helium leak check ports
- Normally closed valve (normally open valve optional)
- Electrically-activated valve override
- Low command flow cutoff
- TTL compatible “valve off” function
Benefits
- Stable, proven product platform
- High flow capability up to 100 lpm (N2 equivalent)
- All-metal flow path enhances gas purity and reduces leaks
- Easily installed and serviced with analog only input/outputs
Specifications
Brand
Seal Material
- Metal
Control Range
- 5 to 100%
Wetted Materials
- 316L, 316L VAR & High Alloy Ferric Stainless Steel
Operating Temperature
- 50° to 105° C (122° to 221° F)
Pressure Rating
- Maximum 1 MPa (145 psi)
Power Requirement
- 350 mA at 15 Vdc (Max.)
Differential Pressure
- psid: 7 to 50 (kPa: 48.26 to 344.7, bar: 0.4826 to 3.447)
Flow Rate (Full Scale Capacity)
- 0.003 to 30 lpm (N2 Equivalent) (5850EMH)
- 10 to 100 lpm (N2 Equivalent) (5851EMH)
Accuracy
- ± 1% of Full Scale
Repeatability
- < ± 0.25% of Rate
Response Time
- < 3 sec
Process Conenction
- 1/4” MVCR
- 3/8-1/2” Male VCR
Valve Type
- Normally Closed
- Normally Open
- Optical Fiber Manufacturing – MCVD, OVD, AVD
- Water Vapor Flow Control
