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GF40 Series Elastomer Sealed Thermal Mass Flow Controller/Meter
Brand: Brooks InstrumentMultiple gases in one device equals maximum process flexibility and productivity.
The GF40 Series elastomer sealed mass flow controllers and meters with Brooks Instrument’s exclusive MultiFlo™ technology provide the perfect choice for systems, processes and facilities that use a variety of gases, change gas types frequently or need to re-range while preserving gas measurement and control accuracy.
It enables a new level of process flexibility combined with unprecedented flow measurement and control performance.
Features- Programmable multi-gas/multi-range capabilities
- Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions
- Sub-1 second flow response time and accuracy of 1% set point for demanding applications
- Well suited for a variety of gases
- Fast response, Hastelloy sensor
- Easily accessible diagnostic service port is independent of tool communication
- Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface
Benefits
- MultiFlo™ technology enables new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime
- MultiFlo™ programming is simple and user-friendly; new gas can be selected in under 60 seconds
- OEMs and large end users can greatly reduce the number of gas and range-specific controllers they inventory
- Excellent process gas accuracy backed by superior metrology systems and calibration based on global standards
- Corrosion-resistant sensor provides unmatched long-term stability ensuring maximum yield and throughput
- User-accessible service port simplifies troubleshooting and diagnostic tasks
- Variety of elastomer seals provide cost performance flexibility across range of applications
- Multi-protocol communication interface supports integration into existing systems
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$2,019.00
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Specifications
Brand
Flow Range (Full Scale Capacity)
- 3 sccm to 50 slpm (N2 Eq.)
Flow Accuracy
- ± 1% of SP 35-100%
- ± 0.35% of FS 2-35%
Repeatability/Reproducibility
- < ± 0.20% SP
Linearity
- ±0.5% FS (Included in Accuracy)
Response Time
- Normally Closed Valve: < 1 sec (within 2% for Steps 0-10 Through 0-100%)
- Normally Open Valve < 3 sec (within 2% for Steps 0-10 Through 0-100%)
Control Range
- 2 to 100%
Zero Stability
- < ±0.5% FS Per Year
Temperature Range
- 5° to 50° C (41° to 122° F)
Maximum Operating Pressure
- 150 psig (10 bar)
Differential Pressure Range
- 3 to 860 sccm (7 to 45 psid)
- 861 to 7,200 sccm (15 to 45 psid)
- 7,201 to 50,000 sccm (25 to 45 psid)
Wetted Material
- 316 Stainless Steel
- Hastelloy C-22
- 1707 PH
- 430 SS
Seal Material
- Viton, Buna, Kalrez, EPDM or Neoprene
Surface Finish
- 32µ inch Ra
Valve Options
- Normally Closed
- Normally Open
- Meter (No Valve)
Communication
- DeviceNet, EtherCAT®, Profibus®, RS485
Power Supply/Comsumption
- Analog / RS-485: 12-24 Vdc, 7 Watt/8 Watt
- DeviceNet™: 11-25 Vdc, 7 Watt/8 Watt
- EtherCAT® / Profibus®: 13.5-27 Vdc, 7 Watt/8 Watt
Certifications & Approvals
- CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE Testing) Safety EN61010-1
- RoHS Directive (2011/65/EU)
- REACH Directive EC 1907/2006
- Solar Cell Chemical Vapor Deposition Systems
- Life Sciences Bioreactors
- Vacuum Processes
- Nanotechnology/MEMS Fabrication
- Plasma, Glass and Web Coating Systems
- Excellent Option for Manifold/Gas Delivery Systems
Documentation
Data Sheets
Product Manuals
- DeviceNet™ Supplemental Manual - GF40, GF80 pdf 643 KB
- EtherCAT® Supplemental Manual - GF40, GF80 pdf 3.9 MB
- GF40 Series installation manual - JA pdf 893 KB
- GF40 Series installation-manual pdf 3.6 MB
- Profibus® Supplemental Manual - GF40, GF80 pdf 1.6 MB
- RS485 A-Protocol Supplemental Manual - GF40, GF80 pdf 370 KB
- RS485 L-Protocol Supplemental Manual - GF40, GF80 pdf 3.8 MB
- RS485 S-Protocol Supplemental Manual - GF40, GF80 pdf 864 KB
