Brooks Instrument Digital Mass Flow Controller and Meter, GF80
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GF80 Series Metal Sealed Thermal Mass Flow Controller/Meter

Brand: Brooks Instrument
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For many industrial and semiconductor processes, both performance and cost efficiency are crucial.

The GF80 Series metal sealed mass flow controllers and meters deliver both: Engineered using the same fast response sensor and patented 4th generation MultiFlo™ technology as our best-selling GF100 series, it’s the right choice for operations that need high performance at a value price point.

Moving to a metal sealed MFC brings the full benefit of MultiFloTM multi-gas/multi-range capability since there are no limitations in gases that can be used, enhanced purity of the gas due to elimination of oxygen permeation through elastomers, and a reduction in maintenance since metal seals will last indefinitely.
Features
  • Long-term zero stability of < ±0.5% full scale per year
  • <1 second settling times
  • Full-scale flow rates up to 300 slpm
  • All-metal seal flow path - 16µ inch Ra surface finish
  • Corrosion-resistant Hastelloy® sensor can operate at lower temperatures for gases prone to thermal decomposition
  • Programmable MultiFloTM capability - one device, thousands of gas types and range combinations without removing the MFC from the gas line or compromising accuracy
  • Best-in-class temperature coefficient specification through active temperature compensation
  • Embedded self-test routines and independent diagnostic/service port
  • Slimline body with VCR fittings
  • DeviceNetTM, Profibus®, RS-485 and analog interfaces
Benefits
  • Fast <1 second flow settling time eliminates wasted gas and process variability
  • No elastomer seals that can have oxygen permeation, requiring replacement over time
  • MultiFloTM simplifies and streamlines changing process gases - no more removing and calibrating MFCs
  • New gases and/or ranges can be set in under 60 seconds
  • Measurement accuracy not affected by temperature variations
  • Convenient access to diagnostics port for maximum uptime
  • Compact size eases integration into tight machine spaces; excellent choice for retrofits
  • Multi-protocol communication interface simplifies integration into existing systems

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Specifications

Brand

VCR / VCO Connection

  • 1/2” VCR

Approvals & Certifications

  • CE EN 6126: 2006
  • FCC Part 15 & Canada IC - Subset of CE Testing
  • RoHS

Flow Range (Full Scale Capacity)

  • 3 sccm to 55 slm

Accuracy

  • ±1% S.P. 35-100%
  • ±0.35% F.S. < 5-35%

Repeatability

  • < ±0.2% S.P.

Linearity

  • ±0.5% F.S. (Included in Accuracy)

Response Time

  • Normally Closed Valve: <1 sec

Control Range

  • < 5% to 100%

Zero Stability

  • < ±0.5% F.S. Per Year

Wetted Material

  • 316 Stainless Steel
  • Hastelloy C-22
  • 17-7 PH
  • 430 Stainless Steel
  • KM-45

Seal Material

  • Metal

Level of Purity / Surface Finish

  • 16µ inch Ra

Valve Options

  • Normally Closed
  • Meter (No Valve)

Maximum Temperature

  • 50° C

Differential Pressure Range

  • 3-860 sccm = 7-45 psid
  • 861-7,200 sccm = 15-45 psid
  • 7,201-50,000 sccm = 25-45 psid
  • 51-300 slm = 30-90 psid (Typical Pressure Drops)

Maximum Pressure

  • Standard GF Series: 150 psig (10 bar)
  • High Flow GF Series: Meter = 75 psig (5 bar), Controller = 150 psig (10 bar)

Digital Communication

  • DeviceNet™
  • Profibus®
  • RS485 S-Protocol
  • RS485 L-Protocol

Electrical Connection

  • Profibus/Analog via 9-Pin "D" Connector
  • RS485/Analog via 9-Pin"D" Connector, 15-Pin "D" Connector
  • DeviceNet™ via 5-Pin "M12" Connector

Power Supply/Comsumption

  • RS485 12-24 Vdc/7 Watts Max or 3.3 Watts Max.
  • Profibus 13.5-27 Vdc/7 Watts Max or 3.3 Watts Max.
  • DeviceNet™ 11-25 Vdc/13.6 Watts Max or 3.3 Watts Max.

  • Cost Efficient Retrofit/Upgrade of Legacy MFCs in Refurbished Semiconductor Process Tools
  • Reduce MFC Inventory in Six-inch/Eight-inch Semiconductor Fabs
  • MOCVD for LED and Power Device Manufacturing
  • Solar/thin Film Chemical Vapor Deposition (CVD) Systems
  • Analytical OEM Equipment

Documentation

Data Sheets

Product Manuals

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